SiO2/grooved Al electrode/LiTaO3 and edge-reflection surface acoustic wave structures having large reflection coefficient, large coupling factor, and excellent temperature characteristic even if Al electrodes are used

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 5 B, 2006, Pages 4647-4650

  Kadota, Michio ^a   Kimura, Tetsuya ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

Edge reflection; Excellent TCF; Grooved AI electrode; Resonator; SiO 2

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM; ELECTROCHEMISTRY; ELECTRODES; REFLECTION; RESONATORS; SHEAR STRESS; TEMPERATURE DISTRIBUTION;

EDGE REFLECTION; ELECTROMECHANICAL COUPLING; EXCELLENT TCF; GROOVED AI ELECTRODE; TEMPERATURE COEFFICIENT OF FREQUENCY (TCF);

SILICA;

EID: 33744481025     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.4647     Document Type: Article

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