The performance of micro heat pipes measured by integrated sensors

Journal of Micromechanics and Microengineering

Volumn 16, Issue 5, 2006, Pages 1047-1050

  Le Berre, Martine ^a   Pandraud, Guillaume ^b   Morfouli, Panagiota ^c   Lallemand, Monique ^b  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

^b UNIVERSITÉ DE LYON   (France)

^c Institut de Microelectronique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TRANSFER; MICROELECTRONICS; POLYSILICON; SENSORS; SILICON; THERMISTORS;

MICRO HEAT PIPE (MHP); SI-SI DIRECT BONDING; TWO-PHASE HEAT TRANSFER;

HEAT PIPES;

EID: 33744475103     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/5/023     Document Type: Article

References (13)

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