Parameter optimization and design aspect for electrocoagulation of silica nano-particles in wafer polishing wastewater

Water Science and Technology

Volumn 53, Issue 6, 2006, Pages 187-194

  Den, W ^a   Huang, C ^b  

^a TUNGHAI UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

CMP; Electrocoagulation; Nano particle; Silica colloids; Slurry; Wafer polishing

Indexed keywords

CHEMICAL MECHANICAL PLANARIZATION; ELECTROCOAGULATION; WAFER POLISHING;

COAGULATION; COLLOIDS; CURRENT DENSITY; DESIGN; OPTIMIZATION; PH; REACTION KINETICS; REMOVAL; SILICA; SLURRIES;

CHEMICAL REACTORS;

NANOPARTICLE; SILICATE;

CHEMICAL REACTORS; COAGULATION; COLLOIDS; CURRENT DENSITY; DESIGN; OPTIMIZATION; PH; REACTION KINETICS; REMOVAL; SILICA; SLURRIES;

COAGULATION; OPTIMIZATION; SLURRY; WASTEWATER;

ARTICLE; CHEMICAL REACTION KINETICS; CONTINUOUS FLOW REACTOR; EQUIPMENT DESIGN; EXPERIMENTAL MODEL; HYDRAULIC CONDUCTIVITY; INTERMETHOD COMPARISON; NANOTECHNOLOGY; NONHUMAN; PH; REACTOR OPTIMIZATION; STEADY STATE; VALIDATION PROCESS; WASTE COMPONENT REMOVAL; WASTE WATER MANAGEMENT;

BIOREACTORS; ELECTROCOAGULATION; ELECTRODES; EQUIPMENT DESIGN; KINETICS; NANOTECHNOLOGY; SILICON DIOXIDE; WASTE DISPOSAL, FLUID; WATER POLLUTANTS, CHEMICAL; WATER PURIFICATION;

EID: 33744465513     PISSN: 02731223     EISSN: None     Source Type: Book Series    
DOI: 10.2166/wst.2006.195     Document Type: Article

References (9)

1. Belongia, B.M., Haworth, P.D., Baygents, J.C. and Raghavan, S. (1999). Treatment of alumina and silica chemical mechanical polishing waste by electrodecantation and electrocoagulation. J. Electrochem. Soc., 146(11), 4124-4130.
2. Chen, G., Chen, X. and Yue, P.L. (2000). Electrocoagulation and electroflotation of restaurant wastewater. J. Environ. Engrg., 126(9), 858-863.
3. Den, W. and Huang, C. (2005). Electrocoagulation for removal of silica nano-particles from chemical-mechanical planarization wastewater. Colloids and Surfaces A: Physicochem. Eng. Aspects, 254(2), 81-89.
4. Ge, J., Qu, J., Lei, P. and Liu, H. (2004). New bipolar electrocoagulation-electroflotation process for the treatment of laundry wastewater. Separat. Purific. Technol., 36(1), 33-39.
5. Han, M. and Lawler, D.F. (1992). The relative insignificance of G in flocculation. J. Am. Water Works Assoc., 84(10), 79-91.
6. Holt, P.K., Barton, G.W., Wark, M. and Mitchell, C.A. (2002). A quantitative comparison between chemical dosing and electrocoagulation. Colloids and Surfaces A: Physicochem Eng. Aspects, 211, 233-248.
7. Lai, C.L. and Lin, S.H. (2003). Electrocoagulation of chemical mechanical polishing (CMP) wastewater from semiconductor fabrication. Chem. Eng. J., 95(9), 205-211.
8. Lin, S.H. and Chi, F.P. (1994). Treatment of textile wastewater by electrochemical methods. Wat. Res., 28, 277-282.
9. Matteson, M.J., Dobson, R.L., Glenn, R.W., Kukunoor, N.S., Waits, W.H. and Clayfield, E.J. (1995). Electrocoagulation and separation of aqueous suspensions of ultrafine particles. Colloids and Surfaces A: Physicochem. Eng. Aspects, 104(1), 101-109.