Design improvements for a linear hybrid step micro-actuator

Microsystem Technologies

Volumn 12, Issue 7, 2006, Pages 646-649

  Hahn, M ^a   Gehrking, R ^a   Ponick, B ^a   Gatzen, H H ^a  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY MACHINES; FINITE ELEMENT METHOD; FITS AND TOLERANCES; MACHINE DESIGN;

ASSEMBLY TOLERANCES; BUILDING HEIGHT; REDESIGN CONSIDERATIONS;

MICROACTUATORS;

EID: 33646943938     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0086-2     Document Type: Article

References (6)

1. Budde T, Hahn M, Foehse M, Edler J, Stölting H-D, Gatzen HH (2004) Design, fabrication, and characterization of a hybrid linear step motor. In: Conference proceedings, Actuator 2004, Bremen, Germany, p 665
2. Foehse M, Gatzen HH (2002) Optimizing the magnetic properties of electroplated permalloy for flux guides in micromotors. In: Proceedings of 7th international symposium on magnetic materials, processes and devices, 202nd meeting of the electrochemical society, Salt Lake City, UT, USA, p 125
3. Föhse M, Edler J, Stölting H-D, Gatzen HH (2003) A batch fabricated linear synchronous motor. In: Proceedings of international mechanical engineering congress and exhibition, IMECE2003-41388, Washington, DC, USA
4. Gatzen HH, Morsbach C, Karyazin A (2002) High precision machining of a longitudinal bearing for a linear microactuator. In: Proceedings of 3rd international euspen conference, Eindhoven, The Netherlands, p 325
5. Gatzen HH, Stölting H-D, Ponick B (2004) Alternatives for micromachined linear actuators. In: Conference proceedings, Actuator 2004, Bremen, Germany, p 317
6. Hahn M, Bedenbecker M, Brand U, Gatzen HH (2004) Evaluation of a linear hybrid micro step motor. In: 206th meeting of the electrochemical society, Honolulu, Hawaii, USA (submitted)