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Volumn 5, Issue , 2003, Pages 693-700

A batch fabricated linear synchronous motor

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETISM; FABRICATION; MACHINE DESIGN; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; STATORS;

EID: 1942455365     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/imece2003-41388     Document Type: Conference Paper
Times cited : (7)

References (15)
  • 1
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    • A Novel Variable Reluctance Micromotor for Linear Actuation
    • Bremen
    • H.H. Gatzen, et al.: "A Novel Variable Reluctance Micromotor for Linear Actuation", Proc. Actuator 2000, Bremen, pp. 363-366, 2000
    • (2000) Proc. Actuator 2000 , pp. 363-366
    • Gatzen, H.H.1
  • 3
    • 0001343814 scopus 로고    scopus 로고
    • Monolithic Gear-Mechanisms Drive by a Polysilicon Surface-Micromachined On-Chip Electrostatic Micromachine
    • Hilton Head Is., South Carolina
    • J. J. Sniegowski, et al.: "Monolithic Gear-Mechanisms Drive by a Polysilicon Surface-Micromachined On-Chip Electrostatic Micromachine" Solid State Sensor and Actuautor Workshop, Hilton Head Is., South Carolina, 1996, pp. 178-182
    • (1996) Solid State Sensor and Actuautor Workshop , pp. 178-182
    • Sniegowski, J.J.1
  • 6
    • 1942421114 scopus 로고    scopus 로고
    • A Miniaturized Laser Scanner in LIGA technology (MILS)
    • Bremen
    • B. Krevet, et al.. "A Miniaturized Laser Scanner in LIGA technology (MILS)", Proc. Actuator 2002, Bremen, pp. 312-315, 2002
    • (2002) Proc. Actuator 2002 , pp. 312-315
    • Krevet, B.1
  • 7
    • 0027562072 scopus 로고
    • Permanent Magnet Micromotors on Silicon Substrates
    • B. Wagner, et al.: "Permanent Magnet Micromotors on Silicon Substrates", Journal of Microelectromechanical Systems, Vol. 2, No. 1, pp. 23-29, 1993
    • (1993) Journal of Microelectromechanical Systems , vol.2 , Issue.1 , pp. 23-29
    • Wagner, B.1
  • 9
    • 1942485222 scopus 로고    scopus 로고
    • High Precision Machining of a Longitudinal Bearing for a Linear Microactuator
    • Eindhoven, The Netherlands
    • H.H. Gatzen, et al.: "High Precision Machining of a Longitudinal Bearing for a Linear Microactuator", 3rd Int. euspen conf., Eindhoven, The Netherlands, pp. 325-328, 2002
    • (2002) 3rd Int. Euspen Conf. , pp. 325-328
    • Gatzen, H.H.1
  • 10
    • 24244439094 scopus 로고    scopus 로고
    • Design, Fabrication, and Characterization of a Miniature Linear Asynchronous Motor
    • Bremen
    • M. Föhse, et al.: "Design, Fabrication, and Characterization of a Miniature Linear Asynchronous Motor", Proc. Actuator 2002, Bremen, pp. 176-179, 2002
    • (2002) Proc. Actuator 2002 , pp. 176-179
    • Föhse, M.1
  • 11
    • 10144228664 scopus 로고    scopus 로고
    • The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS Devices
    • Athens, Greece, (in press)
    • C. Kourouklis, et al.: "The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS Devices", Proc. EMSA 2002, Athens, Greece, (in press)
    • Proc. EMSA 2002
    • Kourouklis, C.1
  • 12
    • 0036693359 scopus 로고    scopus 로고
    • Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator Components
    • T. Kohlmeier, et al.: "Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator Components", Microsystem Technologies, Vol. 8 (2002), pp. 304-307
    • (2002) Microsystem Technologies , vol.8 , pp. 304-307
    • Kohlmeier, T.1
  • 13
    • 26144463471 scopus 로고    scopus 로고
    • Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator
    • Ilmenau
    • M. Föhse, et al.: "Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator" 47. Internationales Wissenschaftliches Kolloqium, Ilmenau, 2002, pp. 215-216
    • (2002) 47. Internationales Wissenschaftliches Kolloqium , pp. 215-216
    • Föhse, M.1
  • 14
    • 0037375659 scopus 로고    scopus 로고
    • Tribological Investigation of Micromachined Silicon Sliders
    • in press
    • H.H. Gatzen, M. Beck: "Tribological Investigation of Micromachined Silicon Sliders", Tribology International, 2003 (in press)
    • (2003) Tribology International
    • Gatzen, H.H.1    Beck, M.2
  • 15
    • 0036907981 scopus 로고    scopus 로고
    • Magnetic Properties of Thick Sputter Deposited SmCo Films For Mems-Applications
    • Digest Intermag Europe 2002, Amsterdam, The Netherlands, GD05 (submitted to)
    • T. Budde, H.H. Gatzen: "Magnetic Properties of Thick Sputter Deposited SmCo Films For Mems-Applications", Digest Intermag Europe 2002, Amsterdam, The Netherlands, GD05 (submitted to J. of Magnetism and Magn. Mat.)
    • (2002) J. of Magnetism and Magn. Mat.
    • Budde, T.1    Gatzen, H.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.