-
1
-
-
0000451631
-
A Novel Variable Reluctance Micromotor for Linear Actuation
-
Bremen
-
H.H. Gatzen, et al.: "A Novel Variable Reluctance Micromotor for Linear Actuation", Proc. Actuator 2000, Bremen, pp. 363-366, 2000
-
(2000)
Proc. Actuator 2000
, pp. 363-366
-
-
Gatzen, H.H.1
-
3
-
-
0001343814
-
Monolithic Gear-Mechanisms Drive by a Polysilicon Surface-Micromachined On-Chip Electrostatic Micromachine
-
Hilton Head Is., South Carolina
-
J. J. Sniegowski, et al.: "Monolithic Gear-Mechanisms Drive by a Polysilicon Surface-Micromachined On-Chip Electrostatic Micromachine" Solid State Sensor and Actuautor Workshop, Hilton Head Is., South Carolina, 1996, pp. 178-182
-
(1996)
Solid State Sensor and Actuautor Workshop
, pp. 178-182
-
-
Sniegowski, J.J.1
-
4
-
-
0032163838
-
Integrated, Variable-Reluctance Magnetic Minimotor
-
E.J. O'Sullivan, et al.: "Integrated, Variable-Reluctance Magnetic Minimotor", IBM Journal of Research and Development Electrochemical Microfabrication Vol. 42, No. 5, 1998, p. 681
-
(1998)
IBM Journal of Research and Development Electrochemical Microfabrication
, vol.42
, Issue.5
, pp. 681
-
-
O'Sullivan, E.J.1
-
5
-
-
1542516250
-
A Magnetically Actuated Scanner for Intravascular Ultrasound Imaging
-
New York, November 11-16, MEMS 23914
-
C.W. Chang, et al.: "A Magnetically Actuated Scanner for Intravascular Ultrasound Imaging", Proceedings of the 2001 ASME International Mechanical Engineering Congress & Exposition, New York, November 11-16, 2001, Vol. 2, MEMS 23914
-
(2001)
Proceedings of the 2001 ASME International Mechanical Engineering Congress & Exposition
, vol.2
-
-
Chang, C.W.1
-
6
-
-
1942421114
-
A Miniaturized Laser Scanner in LIGA technology (MILS)
-
Bremen
-
B. Krevet, et al.. "A Miniaturized Laser Scanner in LIGA technology (MILS)", Proc. Actuator 2002, Bremen, pp. 312-315, 2002
-
(2002)
Proc. Actuator 2002
, pp. 312-315
-
-
Krevet, B.1
-
7
-
-
0027562072
-
Permanent Magnet Micromotors on Silicon Substrates
-
B. Wagner, et al.: "Permanent Magnet Micromotors on Silicon Substrates", Journal of Microelectromechanical Systems, Vol. 2, No. 1, pp. 23-29, 1993
-
(1993)
Journal of Microelectromechanical Systems
, vol.2
, Issue.1
, pp. 23-29
-
-
Wagner, B.1
-
9
-
-
1942485222
-
High Precision Machining of a Longitudinal Bearing for a Linear Microactuator
-
Eindhoven, The Netherlands
-
H.H. Gatzen, et al.: "High Precision Machining of a Longitudinal Bearing for a Linear Microactuator", 3rd Int. euspen conf., Eindhoven, The Netherlands, pp. 325-328, 2002
-
(2002)
3rd Int. Euspen Conf.
, pp. 325-328
-
-
Gatzen, H.H.1
-
10
-
-
24244439094
-
Design, Fabrication, and Characterization of a Miniature Linear Asynchronous Motor
-
Bremen
-
M. Föhse, et al.: "Design, Fabrication, and Characterization of a Miniature Linear Asynchronous Motor", Proc. Actuator 2002, Bremen, pp. 176-179, 2002
-
(2002)
Proc. Actuator 2002
, pp. 176-179
-
-
Föhse, M.1
-
11
-
-
10144228664
-
The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS Devices
-
Athens, Greece, (in press)
-
C. Kourouklis, et al.: "The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS Devices", Proc. EMSA 2002, Athens, Greece, (in press)
-
Proc. EMSA 2002
-
-
Kourouklis, C.1
-
12
-
-
0036693359
-
Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator Components
-
T. Kohlmeier, et al.: "Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator Components", Microsystem Technologies, Vol. 8 (2002), pp. 304-307
-
(2002)
Microsystem Technologies
, vol.8
, pp. 304-307
-
-
Kohlmeier, T.1
-
13
-
-
26144463471
-
Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator
-
Ilmenau
-
M. Föhse, et al.: "Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator" 47. Internationales Wissenschaftliches Kolloqium, Ilmenau, 2002, pp. 215-216
-
(2002)
47. Internationales Wissenschaftliches Kolloqium
, pp. 215-216
-
-
Föhse, M.1
-
14
-
-
0037375659
-
Tribological Investigation of Micromachined Silicon Sliders
-
in press
-
H.H. Gatzen, M. Beck: "Tribological Investigation of Micromachined Silicon Sliders", Tribology International, 2003 (in press)
-
(2003)
Tribology International
-
-
Gatzen, H.H.1
Beck, M.2
-
15
-
-
0036907981
-
Magnetic Properties of Thick Sputter Deposited SmCo Films For Mems-Applications
-
Digest Intermag Europe 2002, Amsterdam, The Netherlands, GD05 (submitted to)
-
T. Budde, H.H. Gatzen: "Magnetic Properties of Thick Sputter Deposited SmCo Films For Mems-Applications", Digest Intermag Europe 2002, Amsterdam, The Netherlands, GD05 (submitted to J. of Magnetism and Magn. Mat.)
-
(2002)
J. of Magnetism and Magn. Mat.
-
-
Budde, T.1
Gatzen, H.H.2
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