|
Volumn 4274, Issue , 2001, Pages 248-257
|
Propagation of short-pulsed laser radiation and stages of ablative deep channel formation
|
Author keywords
Air breakdown; Deep channel; Laser ablation; Plasma
|
Indexed keywords
ABLATION;
ENERGY DISSIPATION;
INFILL DRILLING;
LASER ABLATION;
LASER PULSES;
MICROELECTRONICS;
PLASMAS;
SHIELDING;
ABLATED PARTICLES;
AIR BREAKDOWN;
CHANNEL FORMATION;
DEEP CHANNEL;
LASER-INDUCED SPARKS;
RADIATION PARAMETERS;
SHORT-PULSED LASER;
SUBSTANTIAL REDUCTION;
PULSED LASERS;
|
EID: 33646886467
PISSN: 0277786X
EISSN: 1996756X
Source Type: Conference Proceeding
DOI: 10.1117/12.432516 Document Type: Conference Paper |
Times cited : (13)
|
References (10)
|