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Volumn 4274, Issue , 2001, Pages 248-257

Propagation of short-pulsed laser radiation and stages of ablative deep channel formation

Author keywords

Air breakdown; Deep channel; Laser ablation; Plasma

Indexed keywords

ABLATION; ENERGY DISSIPATION; INFILL DRILLING; LASER ABLATION; LASER PULSES; MICROELECTRONICS; PLASMAS; SHIELDING;

EID: 33646886467     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432516     Document Type: Conference Paper
Times cited : (13)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.