Production and visualization of quaternary combinatorial thin films

Measurement Science and Technology

Volumn 17, Issue 6, 2006, Pages 1399-1404

  Chevrier, V ^a   Dahn, J R ^a  

^a DALHOUSIE UNIVERSITY   (Canada)

Author keywords

Combinatorial thin film; Continuous composition spread; Quaternary; Sputtering; Visualization software; X ray diffraction

Indexed keywords

COBALT; COMPOSITION; COMPUTER SOFTWARE; MAGNETRON SPUTTERING; THIN FILMS; TIN; X RAY DIFFRACTION ANALYSIS;

COMBINATORIAL THIN FILMS; CONTINUOUS COMPOSITION SPREAD; QUATERNARY; VISUALIZATION SOFTWARES;

METALLIC FILMS;

COBALT; COMPOSITION; COMPUTER SOFTWARE; MAGNETRON SPUTTERING; METALLIC FILMS; THIN FILMS; TIN; X RAY DIFFRACTION ANALYSIS;

EID: 33646885474     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/6/017     Document Type: Conference Paper

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