SCOPUS 정보 검색 플랫폼

Volumn 47, Issue 3, 2006, Pages 523-526

Near net-shape fabrication of superelastic NiTi device by sputtering and photoetching

Author keywords

Net shaped structure; Sputtering; Structuring; Superelasticity; Thin films; TiNi

Indexed keywords

DEPOSITION; ETCHING; MAGNETIC HYSTERESIS; MAGNETRON SPUTTERING; PHOTOLITHOGRAPHY; STRAIN CONTROL; TENSILE TESTING; THIN FILMS;

NET SHAPED STRUCTURE; PHOTOETCHING; STRUCTURING; SUPERELASTICITY; TINI;

NICKEL ALLOYS;

EID: 33646842727 PISSN: 13459678 EISSN: None Source Type: Journal
DOI: 10.2320/matertrans.47.523 Document Type: Article

Times cited : (7)

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