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Volumn 26, Issue 5-7, 2006, Pages 1117-1121
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Fabrication and structural characterization of (Ba,Sr)TiO3 thin films produced by Electrostatic Spray Assisted Vapour Deposition
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Author keywords
(Ba,Sr)TiO3; Electrostatic Spray Assisted Vapour Deposition; Thin films
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
DIELECTRIC MATERIALS;
INFRARED DETECTORS;
MICROELECTRONICS;
PERMITTIVITY;
PEROVSKITE;
RAMAN SPECTROSCOPY;
RANDOM ACCESS STORAGE;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR DEVICES;
TITANIUM OXIDES;
BY-PASS CAPACITORS;
ELECTROSTATIC SPRAY ASSISTED VAPOUR DEPOSITION;
LEAD-FREE SOLID SOLUTION;
TUNABLE MICROWAVE DEVICES;
THIN FILMS;
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EID: 33646832556
PISSN: 09284931
EISSN: None
Source Type: Journal
DOI: 10.1016/j.msec.2005.09.046 Document Type: Article |
Times cited : (11)
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References (14)
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