Deep glass etched microring resonators based on silica-on-silicon technology

Electronics Letters

Volumn 42, Issue 10, 2006, Pages 581-583

  Ou, H ^a   Rottwitt, K ^a   Philipp, H ^a,b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; GLASS; SILICA; SILICON;

DEEP GLASS ETCHING; SILICA-ON-SILICON TECHNOLOGY; TRANSMISSION SPECTRUM;

RESONATORS;

EID: 33646685008     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20060200     Document Type: Article

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