Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 20, Issue 4, 2002, Pages 1458-1461

  Goto, Masahiro ^a   Kasahara, Akira ^a   Tosa, Masahiro ^a   Hobley, Jonathan ^b   Kishimoto, Maki ^c   Yoshihara, Kazuhiro ^a   Fukumura, Hiroshi ^b  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AEROSPACE APPLICATIONS; AUGER ELECTRON SPECTROSCOPY; BORON COMPOUNDS; COPPER; EXCIMER LASERS; FRICTION; LASER BEAMS; MAGNETRON SPUTTERING; OXYGEN; STAINLESS STEEL; ULTRAHIGH VACUUM; VICKERS HARDNESS TESTING;

AEROSPACE COATINGS; BORON NITRIDE; EXCIMER LASER IRRADIATION; LOW FRICTIONAL COATINGS; MAGNETRON COSPUTTER DEPOSITION; SCANNING AUGER ELECTRON SPECTROMETER; VACUUM FRICTION; VICKERS HARDNESS MEASURING SYSTEM;

COATINGS;

EID: 0036649105     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1487873     Document Type: Article

References (3)