XPS investigation of CoOx-based MRISiC structures for hydrocarbon gas sensing

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 736-739

  Comini, E ^b   Cusma A ^a   Kaciulis, S ^a   Kandasamy, S ^c   Padeletti, G ^a   Pandolfi, L ^a   Sberveglieri, G ^b   Trinchi, A ^c   Wlodarski, W ^c  

^a CNR   (Italy)

^b UNIVERSITY OF BRESCIA   (Italy)

^c RMIT UNIVERSITY   (Australia)

Author keywords

AFM; Depth profiling; Gas sensors; Metal oxide; Schottky diodes; XPS

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL SENSORS; COBALT COMPOUNDS; HYDROCARBONS; MOS DEVICES; OXIDATION; PLATINUM; PROPYLENE; SCHOTTKY BARRIER DIODES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPTH PROFILING; HYDROCARBON GAS SENSING; METAL OXIDES; METAL-REACTIVE INSULATOR-SILICON CARBIDE (MRISIC);

SILICON CARBIDE;

EID: 33646569142     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2266     Document Type: Conference Paper

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