MEMS actuated deformable mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6113, Issue , 2006, Pages

  Papavasiliou, Alexandras ^a   Olivier, Scot ^a   Barbee, Troy ^a   Walton, Chris ^a   Cohn, Michael ^b  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b MicroAssembly Technologies   (United States)

Author keywords

Deformable mirrors; MEMS; Nanolaminates

Indexed keywords

DEFORMABLE MIRRORS; MEMS; METAL COMPRESSION BONDING; NANOLAMINATE FOILS;

ACTUATORS; ADAPTIVE OPTICS; OPTICAL DESIGN; TELESCOPES;

MIRRORS;

EID: 33646126517     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.657667     Document Type: Conference Paper

References (4)

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