Determination of inorganic species in the solution extracted from cleanroom gloves used in semiconductor process

Bulletin of the Korean Chemical Society

Volumn 20, Issue 2, 1999, Pages 226-228

  Heo, Y W ^a   Lim, H B ^b  

^a Dankook University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALKALI METAL; ALUMINUM; AMMONIUM DERIVATIVE; BARIUM; BERYLLIUM; BISMUTH; BROMINE; CADMIUM; CALCIUM; CHLORINE; GALLIUM; INORGANIC COMPOUND; LATEX; MAGNESIUM; MANGANESE; NICKEL; NITRATE; NITRITE; PHOSPHOROUS ACID; POLYETHYLENE; POTASSIUM; RUBIDIUM; SELENIUM; SILVER; SODIUM; STRONTIUM; SULFATE; ZINC;

ADSORPTION; ANALYTIC METHOD; ARTICLE; ATOMIC ABSORPTION SPECTROMETRY; ATOMIC EMISSION SPECTROMETRY; CHEMICAL ANALYSIS; EXTRACTION; GLOVE; ION PAIR CHROMATOGRAPHY; SEMICONDUCTOR; SOLUBILITY;

EID: 0032936532     PISSN: 02532964     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (9)

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