Gray scaling in high performance mask making

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5853 PART II, Issue , 2005, Pages 1031-1042

  Martinsson, Hans ^a   Sandstrom, Tor ^a  

^a Micronic Laser Systems AB   (Sweden)

Author keywords

Address resolution; Gray scaling; Partial coherence; SLM

Indexed keywords

COHERENT LIGHT; IMAGE PROCESSING; IMAGE QUALITY; OPTICAL RESOLVING POWER; PHOTOLITHOGRAPHY; SEMICONDUCTOR DEVICE MANUFACTURE; THROUGHPUT;

ADDRESS RESOLUTION; GRAY SCALING; PARTIAL COHERENCE; SLM;

MASKS;

EID: 28544440983     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617527     Document Type: Conference Paper

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