Ordered SiGe islands on vicinal and pre-patterned Si(0 0 1) substrates

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1730-1735

  Zhong, Z ^a   Lichtenberger, H ^a   Chen, G ^a   Muhlberger M ^a   Schelling, C ^a   Myslivecek, J ^a   Halilovic, A ^a   Stangl, J ^a   Bauer, G ^a   Jantsch, W ^a   Schaffler F ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Growth kinetics; Ordered islands; Pre patterned; Self assembled; Si based heterostructure; Step bunching

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; GROWTH KINETICS; HETEROJUNCTIONS; SELF ASSEMBLY; SEMICONDUCTING SILICON;

ORDERED ISLANDS; PRE-PATTERNED; SELF-ASSEMBLED; STEP-BUNCHING;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 33646057335     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.115     Document Type: Article

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