Deeply etched waveguide structures for quantum cascade lasers

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1163-1166

  Schartner, S ^a   Golka, S ^a   Pflugl C ^a   Schrenk, W ^a   Strasser, G ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Deep etching; Distributed feedback; Photonic crystals; Quantum cascade lasers

Indexed keywords

CRYSTALS; DISTRIBUTED FEEDBACK LASERS; INDUCTIVELY COUPLED PLASMA; PLASMA ETCHING; QUANTUM THEORY; WAVEGUIDES;

DEEP ETCHING; DISTRIBUTED FEEDBACK; PHOTONIC CRYSTALS; QUANTUM CASCADE LASERS;

SEMICONDUCTOR LASERS;

EID: 33646056404     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.032     Document Type: Article

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