Micro wetting system by controlling pinning and capillary forces

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1280-1283

  Niiyama, Takayoshi ^a   Kawai, Akira ^a  

^a NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Capillary force; Micro wetting; Pinning effect; Resist; Wetting property

Indexed keywords

CAPILLARY FLOW; FLOW OF FLUIDS; FORCE CONTROL; LAPLACE TRANSFORMS;

CAPILLARY FORCE; MICRO WETTING; PINNING EFFECT; RESIST; WETTING PROPERTY;

WETTING;

EID: 33646054563     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.132     Document Type: Article

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