A novel optical gas sensor based on sputtered InxOyNz films with gold-nano-dots

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1197-1200

  Steffes, H ^a   Schleunitz, A ^a   Gernert, U ^a   Chabicovsky, R ^b   Obermeier, E ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Gold nano dots; Hydrogen sensor; Multilayer system; Optical gas sensor; Sputtered InxOyNz thin film

Indexed keywords

CADMIUM SULFIDE; GOLD; NANOSTRUCTURED MATERIALS; PHOTORESISTORS; SPUTTERING; THIN FILMS;

GOLD-NANO-DOTS; HYDROGEN SENSOR; OPTICAL GAS SENSOR; SPUTTERED INXOYNZ THIN FILM;

CHEMICAL SENSORS;

EID: 33646026727     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.153     Document Type: Article

References (13)

1. Ando M., Swart C., Pringsheim E., Mirsky V.M., and Wolfbeis O.S. Sensors and Actuators B 108 (2005) 528-534
2. Y.S. Lee, D.D. Lee, Proc. IEEE Sensors 2002, Orlando, USA, June 11-14, 2002, paper 46.3.
3. Liu C.J., Lin J.T., Wang S.H., Jiang J.C., and Lin L.G. Sensors and Actuators B 108 (2005) 521-527
4. Ando M., Chabicovsky R., and Haruta M. Sensors and Actuators B 76 (2001) 13-17
5. Ando M., Kobayashi T., Iijima S., and Haruta M. Sensors and Actuators B 96 (2003) 589-595
6. Ando M., Kobayashi T., and Haruta M. Catalysis Today 36 (1997) 135-141
7. Steffes H., Imawan C., Fricke P., Voehse H., Albrecht J., Schneider R., Solzbacher F., and Obermeier E. Sensors and Actuators B 77 (2001) 352-358
8. H. Steffes, Ph.D. thesis (in German), Berlin University of Technology, Berlin, Germany, 2002.
9. Steffes H., and Obermeier E. Sensors and Actuators B 95 (2003) 252-257
10. Steffes H., Imawan C., Solzbacher F., and Obermeier E. Sensors and Actuators B 78 (2001) 106-112
11. Ando M., Steffes H., Chabicovsky R., Haruta M., and Stangl G. IEEE Sensors Journal 04 2 (2004) 232-236
12. M. Post, C. Cantalini, A. Martucci, D. Buso, M. Guglielmi, Technical Digest of Eurosensors XVIII, Rome, 12-15 Sept. 2004, 796-797.
13. Bohren C.F., and Huffman D.R. Absorption and scattering of light by small particles (1983), John Wiley & Sons, New York, USA