Optical and Electrical H2- and NO2-Sensing Properties of Au/InxOvNz Films

IEEE Sensors Journal

Volumn 4, Issue 2, 2004, Pages 232-236

  Ando, Masanori ^a   Steffes, Harald ^b   Chabicovsky, Rupert ^c   Haruta, Masatake ^d   Stangl, Guenther ^c  

^a Japan Natl Inst Adv IS T   (Japan)

^b TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^c VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^d NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Au InxOyNz films; Electrical NO2 sensor; Optical H2 sensor

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; ELECTRIC PROPERTIES; EXHAUST GASES; INDIUM COMPOUNDS; NITROGEN OXIDES; OPTICAL PROPERTIES; OPTICAL SENSORS; SCANNING ELECTRON MICROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

AU/INXOYNZ FILMS; ELECTRICAL NO2 SENSOR; OPTICAL H2 SENSOR; OPTICAL SENSITIVITY;

METALLIC FILMS;

EID: 2342539739     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.823656     Document Type: Article

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