Monolithic 3-D microfabrication of mechanisms with multiple independently-moving parts

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 569-578

  Cohen, Adam L ^a   Wooden, Susan M ^b  

^a MICROFABRICA INC   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED SYSTEMS; MICROFABRICATION TECHNOLOGY; MONOLITHIC 3-D MICROFABRICATION; MULTI-FUNCTIONAL INSTRUMENT;

COMPUTER AIDED DESIGN; LARGE SCALE SYSTEMS; MECHANISMS; NONINVASIVE MEDICAL PROCEDURES; SURGERY;

MICROELECTROMECHANICAL DEVICES;

EID: 33645964941     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-82166     Document Type: Conference Paper

References (4)

1. Tseng, F-G. et al., 1999, "EFAB: A Novel Low Cost Low Temperature Micromachining Process for Manufacturing Arbitrary 3-D Metal Parts", MEMS Symposium, ASME 1999 International Mechanical Engineering Congress and Exposition, Nashville, TN November, 14-19, 1999.
2. Kruglick, E. et al., (in press), "EFAB Technology and Applications", The MEMS Handbook, second edition, CRC Press, Boca Raton, pp. 6-1-6-20.
3. Frecker, M., et al., 2003, "Multifunctional Instruments for Laparoscopic Surgery: Design and Testing of Initial Prototypes", Journal of the Society of Laparoendoscopic Surgeons.
4. Wallwiener, D. et al., 1995, "Multifunctional instrument for operative laparoscopy: technical, experimental and clinical results in gynaecology", Endosc Surg Allied Technol. Apr-Jun; 3(2-3): 119-24