Ultra-deep plasma-assisted drilling of solids by high-power nanosecond lasers: Experimental studies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6107, Issue , 2006, Pages

  Paul, Stanley ^a   Lyon, Kevin ^a   Kudryashov, Sergey I ^a   Allen, Susan D ^a  

^a ARKANSAS STATE UNIVERSITY   (United States)

Author keywords

Dielectric materials; High power nanosecond lasers; Multi micron deep drilling; Photoacoustic and optical monitoring and characterization; Short wavelength plasma radiation; Silicon

Indexed keywords

DIELECTRIC MATERIALS; DRILLING; LASER ABLATION; LIGHT TRANSMISSION; OPACIFIERS; SILICON; TRANSPARENCY;

HIGH POWER NANOSECOND LASERS; MULTI MICRON DEEP DRILLING; PHOTOACOUSTIC AND OPTICAL MONITORING AND CHARACTERIZATION; SHORT WAVELENGTH PLASMA RADIATION;

HIGH POWER LASERS;

EID: 33645962823     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.647003     Document Type: Conference Paper

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