Indium tin oxide thin-film sensor for detection of Volatile Organic Compounds (VOCs)

Materials and Manufacturing Processes

Volumn 21, Issue 3, 2006, Pages 257-261

  Vaishanv, V S ^a   Patel, P D ^a   Patel, N G ^b  

^a SARDAR PATEL UNIVERSITY   (India)

^b UNIVERSITY OF NORTH FLORIDA   (United States)

Author keywords

Indium tin oxide (ITO); Semiconductor gas sensor; Thin film sensor; Volatile organic compound (VOC)

Indexed keywords

ACETONE; CATALYSIS; ETHANOL; EVAPORATION; GLASS; INDIUM COMPOUNDS; METHANOL; SENSORS; SUBSTRATES; VOLATILE ORGANIC COMPOUNDS;

INDIUM TIN OXIDE (ITO); OPERATING TEMPERATURES; SEMICONDUCTOR GAS SENSORS; THIN FILM SENSORS;

THIN FILMS;

EID: 33645792385     PISSN: 10426914     EISSN: 15322475     Source Type: Journal    
DOI: 10.1080/10426910500464511     Document Type: Article

References (14)

1. 2 gas-sensor array and artificial neural network. Sensors and Actuators 2003, B 96, 24-37.
2. Winterbottom, D.A.; Narayanaswamy, R.; Raimundo Jr. I.M. Cholesteric liquid crystals for detection of organic vapors. Sensors and Actuators 2003, B 90, 52-57.
3. Promsong, L.; Sriyudthsak, M. Thin tin-oxide film alcohol gas sensor. Sensors and Actuators 1995, B 24-35, 504-506.
4. Anno, Y.; Maekawa, T.; Tamaki, J.; Asano, Y.; Hayashi, K.; Miura, N.; Yamazoe, N. Zinc-oxide based semiconductor sensors for detecting acetone and capronaldehyde in the vapor of consommesoup. Sensors and Actuators 1995, B 24-25, 623-627.
5. 2 gas sensors. Thin Solid Films 1990, 186, 349-360.
6. Patel, N.G.; Vaishanv, V.S. Fabrication of carbon dioxide gas sensor and its alaram system using indium tin oxide thin films. Sensors and Actuators 1994, B 21, 193-197.
7. Patel, N.G.; Vaishanv, V.S. Fabrication of carbon tetrachloride gas sensors using indium tin oxide thin films. Sensors and Actuators 1995, B 23, 49-53.
8. Patel, N.G.; Patel, P.D.; Vaishnav, V.S. Indium tin oxide (ITO) thin-film gas sensor for detection of methanol at room temperature. Sensors and Actuators 2003, B 96, 180-189.
9. Vaishnav, V.S.; Patel, P.D.; Patel, N.G. Indium tin oxide thin-film gas sensors for detection of ethanol vapors. In Proceedings, 4th International Workshop on Semiconductor Gas Sensors, Ustron, Poland, September 19-23, 2004.
10. Vaishnav, V.S.; Patel, P.D.; Patel, N.G. Preparation and characterization of indium tin oxide thin films for the application as gas sensor. In Proceedings of the 8th International Conference on Polycrystalline Semiconductors (POLYSE 2004), Potsdam, Germany, September 5-10, 2004.
11. Morrison, S.R. Chemical sensors. In Semiconductor Sensors. Sze, S.M., Ed.; John Wiley & Sons, Inc., 1994; 383-413.
12. 22 sensors. Sensors and Actuators 1999, B 58, 370-374.
13. D'Amico, A.; Di Natale, C. A contribution on some basic definitions of sensors properties. IEEE Sensors Journal 2001, 1183-1190.
14. Vaishnav, V.S. Development and Applications of Indium Tin Oxide Thin Film Gas Sensors. Sardar Patel Univeristy, Vallabh Vidyanagar, Gujarat, India, 2001.