Orientation dependence of gas sensing properties of TiO2 films

Sensors and Actuators, B: Chemical

Volumn 115, Issue 1, 2006, Pages 123-127

  Moon, Won Taek ^a   Lee, Kyu Sung ^a   Jun, Youn Ki ^a   Kim, Hyun Su ^a   Hong, Seong Hyeon ^a  

^a Seoul National University   (South Korea)

Author keywords

Gas sensor; Orientation dependence; Sapphire substrate; TiO2 film

Indexed keywords

CRYSTALLOGRAPHY; FILMS; MAGNETRON SPUTTERING; PERFORMANCE; POLYCRYSTALLINE MATERIALS; SAPPHIRE; SUBSTRATES; TITANIUM OXIDES;

GAS SENSING; ORIENTATION DEPENDENCE; SAPPHIRE SUBSTRATE; TIO2 FILMS;

CHEMICAL SENSORS;

EID: 33645781596     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.08.024     Document Type: Article

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