Molecular dynamics simulation of nano-indentation of carbon coated monocrystalline silicon

Key Engineering Materials

Volumn 312, Issue , 2006, Pages 351-356

  Cheong, W C D ^a   Zhang, L C ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

Diamond coating; Monocrystalline silicon; Nano indentation; Phase transformation; Plastic deformation

Indexed keywords

CARBON; COATINGS; CRYSTALLINE MATERIALS; INDENTATION; MOLECULAR DYNAMICS; NANOSTRUCTURED MATERIALS; PLASTIC DEFORMATION; SUBSTRATES;

DIAMOND COATING; DIAMOND-LIKE CARBON (DLC); MONOCRYSTALLINE SILICON; NANO-INDENTATION; PHASE TRANSFORMATION;

SILICON;

EID: 33645745980     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-994-6.351     Document Type: Article

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