3-D defect characterization using plan view and cross-sectional TEM/STEM analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 2005, Issue , 2005, Pages 344-349

  Stark, Terrence J ^a   Russell, Phillip E ^a   Nevers, Corey ^b  

^a Materials Analytical Services   (United States)

^b TRIQUINT SEMICONDUCTOR   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33645683365     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. T. Yaguchi, T. Kamino, T. Ishitani, R. Urao, Microscopy and Microanalysis 5, 363-370 (1999).
2. K. Mcllwrath, N. Wang, ISTFA 2004, p.320.
3. D. Mathes, J. Guenter, B. Hawkins, B. Hawthorne, C. Johnson, ISTFA 2005, (this volume).
4. D. Mathes, Ph.D. Thesis, University of Virginia, 2002.