Surface-micromachined counter-meshing gears discrimination device

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3328, Issue , 1998, Pages 365-373

  Polosky, Marc A ^a   Garcia, Ernest J ^a   Allen, James J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Coded devices; Counter meshing gears; Discriminators; Lock out mechanisms; Stronglinks

Indexed keywords

CONCRETE BRIDGES; DISCRIMINATORS; INTELLIGENT STRUCTURES; MEMS; MICROELECTROMECHANICAL DEVICES; SURFACE TESTING;

CODED DEVICES; COUNTER-MESHING GEARS; LOCK-OUT MECHANISMS; STRONGLINKS;

GEARS;

EID: 33645634832     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.320189     Document Type: Conference Paper

References (4)

1. E. J. Garcia and J. J. Sniegowski, "Surface Micromachined Microengine as the Driver for Micromechanical Gears," Proc. 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95), Stockholm, Sweden, June 25-29, 1995, vol. 1, pp. 365-368.
2. E. J. Garcia and J. J. Sniegowski, "Surface Micromachined Microengine," Sensors and Actuators A (48), pp.203-214 (1995).
3. E. J. Garcia, "Micro-Flex Mirror and Instability Actuation Technique," Proc. of Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS'98), Heidelberg, Germany, January 25-29, 1998.
4. J. J Sniegowski and E. J. Garcia, "Microfabricated Actuators and their Applications to Optics," Proc. SPIE, San Jose, CA, vol.2383, 1995, pp. 46-64.