Precise measurement of the dielectric properties of Bax Sr1-xTiO3 thin films by on-wafer through-reflect-line (TRL) calibration method

Journal of the European Ceramic Society

Volumn 26, Issue 10-11, 2006, Pages 1835-1839

  Bhakdisongkhram, G ^a   Okamura, S ^a   Shiosaki, T ^a  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

BST; Dielectric properties; Electrical properties; Films; Perovskites

Indexed keywords

CALIBRATION; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES; ELECTRIC PROPERTIES; PERMITTIVITY; PEROVSKITE; POLYCRYSTALLINE MATERIALS; SAPPHIRE; SPUTTERING; THIN FILMS;

BST; THROUGH REFLECT LINE;

BARIUM COMPOUNDS;

BARIUM COMPOUNDS; CALIBRATION; DIELECTRIC LOSSES; DIELECTRIC PROPERTIES; ELECTRIC PROPERTIES; PERMITTIVITY; PEROVSKITE; POLYCRYSTALLINE MATERIALS; SAPPHIRE; SPUTTERING; THIN FILMS;

EID: 33645551407     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2005.09.011     Document Type: Conference Paper

References (4)

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2. S. Delprat M. Ouaddari F. Vidal M. Chaker K. Wu Voltage and frequency dependent dielectric properties of BST-0.5 thin films on alumina substrates IEEE Microwave Wireless Comp. Lett. 13 2003 211-213
3. D.M. Pozar Microwave Engineering 2nd ed. 1998 John Wiley and Sons New York pp. 217-221
4. O.G. Vendik S.P. Zubko Modeling microwave dielectric characteristics of thin ferroelectric films for tunable planar structures Integrated Ferroelectr. 34 2001 215-226