Epitaxial growth of PLZT thin film on SrTiO3 substrate by sputtering method

Integrated Ferroelectrics

Volumn 75, Issue , 2005, Pages 155-161

  Qiu, P S ^a   Cheng, W X ^a   He, X Y ^a   Zheng, X S ^a   Ding, A L ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

Epitaxial growth; PLZT thin film; Sputtering condition; SrTio3 substrate

Indexed keywords

COERCIVE FORCE; EPITAXIAL GROWTH; FERROELECTRICITY; HYSTERESIS; MAGNETRON SPUTTERING; SUBSTRATES;

METAL-FERROELECTRIC-SEMICONDUCTOR CAPACITOR CONFIGURATION (MFS); PLZT THIN FILMS; SPUTTERING CONDITION; SRTIO3 SUBSTRATE;

THIN FILMS;

EID: 33645550197     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580500414283     Document Type: Conference Paper

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