Saturation effects in solid-state photodiodes and impact on EUVL pulse energy measurements

Metrologia

Volumn 43, Issue 2, 2006, Pages

  Vest, R E ^a   Hill, S B ^a   Grantham, S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ERROR ANALYSIS; LITHOGRAPHY; NATURAL FREQUENCIES; SILICON; ULTRAVIOLET RADIATION;

EUVL PULSE ENERGY MEASUREMENTS; EXTREME ULTRAVIOLET LITHOGRAPHY (EUVL); SOLID-STATE PHOTODIODES;

PHOTODIODES;

EID: 33645528022     PISSN: 00261394     EISSN: 16817575     Source Type: Journal    
DOI: 10.1088/0026-1394/43/2/S17     Document Type: Conference Paper

References (11)

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