Diaphragm-type acoustic sensor based on sputtered piezoelectric thin film

Sensors and Materials

Volumn 17, Issue 8, 2005, Pages 423-432

  Garg, Atul ^a   Rajanna, K ^a  

^a INDIAN INSTITUTE OF SCIENCE   (India)

Author keywords

Acoustic sensor; Diaphragm; Frequency response; Piezoelectric thin film; Sound pressure level

Indexed keywords

EID: 33645518255     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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