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Volumn 76, Issue , 2005, Pages 39-46

The effect of DC bias on the resonant frequency of PZT micro-sensor

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; LEAD COMPOUNDS; MICROSENSORS; MULTILAYERS; SIGNAL PROCESSING; VOLTAGE CONTROL;

EID: 33645516827     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580500413459     Document Type: Conference Paper
Times cited : (3)

References (8)
  • 1
    • 0036544041 scopus 로고    scopus 로고
    • PZT thin films for piezoelectric microactuator applications
    • H. Kueppers and T. Leuerer, PZT thin films for piezoelectric microactuator applications. Sensors and Actuators A 97-98, 680-684 (2002).
    • (2002) Sensors and Actuators A , vol.97-98 , pp. 680-684
    • Kueppers, H.1    Leuerer, T.2
  • 2
    • 0037445453 scopus 로고    scopus 로고
    • The compatibility of ZnO piezoelectric film with micromachining process
    • Tao Xu and Guoying Wu, The compatibility of ZnO piezoelectric film with micromachining process. Sensors and Actuators A 104, 61-67 (2003).
    • (2003) Sensors and Actuators A , vol.104 , pp. 61-67
    • Xu, T.1    Wu, G.2
  • 3
    • 0043284188 scopus 로고    scopus 로고
    • Structure design of micro touch sensor array
    • Liqun Du and Guiryong Kwon, Structure design of micro touch sensor array. Sensors and Actuators A 107, 7-13 (2003).
    • (2003) Sensors and Actuators A , vol.107 , pp. 7-13
    • Du, L.1    Kwon, G.2
  • 5
    • 0942300696 scopus 로고    scopus 로고
    • Effect of DC bias field on the complex materials coefficients of piezoelectric resonantors
    • Qing-Ming Wang and Tao Zhang, Effect of DC bias field on the complex materials coefficients of piezoelectric resonantors. Sensors and actuators A 109, 149-155 (2003).
    • (2003) Sensors and Actuators A , vol.109 , pp. 149-155
    • Wang, Q.-M.1    Zhang, T.2
  • 7
    • 0038035212 scopus 로고    scopus 로고
    • Self-exited piezoelectric microcantilever for gas detection
    • Jia Zhou and Po Li, Self-exited piezoelectric microcantilever for gas detection. Microelectronic Engineering 69, 37-46 (2003).
    • (2003) Microelectronic Engineering , vol.69 , pp. 37-46
    • Zhou, J.1    Li, P.2
  • 8
    • 0042090939 scopus 로고    scopus 로고
    • Zeolite-modified microcantilever gas sensor for indoor air quality control
    • Jia Zhou and Po Li, Zeolite-modified microcantilever gas sensor for indoor air quality control. Sensors and Actuators B 94, 337-342 (2003).
    • (2003) Sensors and Actuators B , vol.94 , pp. 337-342
    • Zhou, J.1    Li, P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.