Aluminum alloy sputtering target for TFT-LCDs

R and D: Research and Development Kobe Steel Engineering Reports

Volumn 52, Issue 2, 2002, Pages 2-5

  Yoshikawa, Kazuo ^a   Onishi, Takashi ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM ALLOYS; LIQUID CRYSTAL DISPLAYS; MAGNETIC DISK STORAGE; OPTICAL DISK STORAGE; SPRAYING; THIN FILMS;

ELECTRONIC COMPONENTS; LCD MANUFACTURERS; SPRAY FORMING; SPUTTERING TARGET;

SPUTTERING;

EID: 33645432645     PISSN: 03738868     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (5)

1. T. Onishi et al.: Amerian Institute of Physics Conference Proceedings, No. 418 (1997), p.383.
2. T. Onishi et al.: J. Vac. Sci. Technol. A15(4), Jul / Aug 1997.
3. K. Yoshikawa et al.: Powder Metallurgy, Vol.43, No.3 (2000), p.198.