Spray formed aluminum alloys for sputtering targets

Powder Metallurgy

Volumn 43, Issue 3, 2000, Pages 198-199

  Yoshikawa, K ^a   Yoneda, Y ^a   Koide, K ^a,b  

^a KOBELCO RESEARCH INSTITUTE INC   (Japan)

^b KOBE STEEL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; LIQUID CRYSTAL DISPLAYS; METALLOGRAPHIC MICROSTRUCTURE; SPUTTERING; THIN FILMS;

SPRAY FORMED-TARGETS;

ALUMINUM ALLOYS;

EID: 0033659541     PISSN: 00325899     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. K. TAKAGI, E. IWAMURA, T. ONISHI, and K. YOSHIKAWA: Proc. 15th Int. Display Research Conf., 1995, Society of Information Displays, 461.
2. T. ONISHI, E. IWAMURA, and K. TAKAGI: J. Vac. Sci. Technol. A, July-Aug. 1997, 15, (4).