Studies on spray deposited SnO2, Pd:SnO2 and FiSnO2 thin films for gas sensor applications

Synthesis and Reactivity in Inorganic, Metal-Organic and Nano-Metal Chemistry

Volumn 36, Issue 1, 2006, Pages 131-135

  Subramanian, N Sankara ^a   Santhi, B ^b   Sundareswaran, S ^a   Venkatakrishnan, K S ^a  

^a THIAGARAJAR COLLEGE OF ENGINEERING   (India)

^b MADURAI KAMARAJ UNIVERSITY   (India)

Author keywords

Adsorption; Desorption; Detection sensitivity; Gas sensor; Response and recovery characteristics

Indexed keywords

EID: 33645311519     PISSN: 15533174     EISSN: 15533182     Source Type: Journal    
DOI: 10.1080/15533170500478883     Document Type: Conference Paper

References (13)

1. Sberveglieri, G. Recent developments in semiconducting thinfilm gas sensors. Sensors Actuators B 1995, 23, 103-109.
2. Gopel, W.; Schierbaum, K. D. SnO2 sensors: Current status and future prospects. Sensors Actuators B 1995, 26-27, 1-12.
3. Cirilli, F.; Kaciulis, S.; Mattogno, G.; Galdikas, A.; Mironas, A.; Senuliene, D.; Setkkus, A. Influence of Cu overlayer on the properties of SnO2 - based gas sensors. Thin Solid Films, 1998, 375, 310-315.
4. Zemel, J. N. Theoretical description of gas-film interaction on SnOx. Thin Solid Films 1988, 163, 189-202.
5. Cao, X.; Cao, L.; Yao, W.; Ye, X. Influences of dopants on the electronic structure of SnO2 thin films. Thin Solid Films 1998, 317, 443-445.
6. Labeau, M.; Gas'kov, A. M.; Gautheron, B.; Senateur, J. P. Synthesis of Pd-doped SnO2 films on silicon and interaction with ethanol and Co. Thin Solid Films 1994, 248, 6-11.
7. Madhusudhana Reddy, M. H.; Chandorkar, A. N. E-beam deposited SnO2, Pt-SnO2 and Pd-SnO2 thin films for LPG detection. Thin Solid Films 1999, 349, 260-265.
8. Cobianu, C.; Savaniu, C.; Buiu, O.; Dascalu, D.; Zaharescu, M.; Parlog, C.; van den Berg, A.; Pecz, B. SnO2 sol-gel derived thin films for integrated gas sensors. Sensors Actuators B 1997, 43, 114-120.
9. Gordillo, G.; Moreno, L. C.; de la Cruz, W.; Teheran, P. Preparation and characterization of SnO2 thin films deposited by spray pyrolysis from SnC12 and SnC14 precursors. Thin Solid Films 1994, 252, 61-66.
10. Sankara Subramanian, N.; Santhi, B.; Veeraganesh, V.; Vinoth, C.; Murugan, G.; Karthick Subbaraj, G. Studies on evaporated titanium oxide thin films for oxygen gas detection. Ionics 2004, 10, 56-62.
11. Proscia, J.; Roy, G. G. Properties of fluorine-doped tin oxide films produced by atmospheric pressure chemical vapour epositior from tetramethyltin, bromotrifluoromethane and oxygen. Thin Solid Films 1992, 274, 175-187.
12. Sanon, G.; Rup, R.; Mansingh, A. Growth and characterization of tin oxide films prepared by chemical vapour deposition. Thin Solid Films 1990, 190, 287-301.
13. Chopra, K. L.; Major, S.; Pandya, D. K. Transparent conductors - A status review. Thin Solid Films 1983, 102, 1-46.