Hydrogen retention in carbon-tungsten co-deposition layer formed by hydrogen RF plasma

Thin Solid Films

Volumn 506-507, Issue , 2006, Pages 188-191

  Katayama, K ^a   Kawasaki, T ^a   Manabe, Y ^a   Nagase, H ^a   Takeishi, T ^a   Nishikawa, M ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Carbon; Co deposition; Hydrogen retention; RF plasma; Tungsten

Indexed keywords

CARBON; DEPOSITION; DEUTERIUM; PLASMAS; SPUTTERING; TUNGSTEN;

CARBON-TUNGSTEN CO-DEPOSITION LAYERS (C-W LAYERS); CO-DEPOSITION; HYDROGEN RETENTION; RF PLASMA;

ABSORPTION;

EID: 33645286735     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.025     Document Type: Conference Paper

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