High power dpss laser micromachining of silicon, tungsten and stainless steel for device singulation

24th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2005 - Congress Proceedings

Volumn , Issue , 2005, Pages 34-41

  Karnakis, Dimitris ^a,b   Rutterford, Graham ^a   Knowles, Martyn ^a,c  

^a OXFORD LASERS LTD   (United Kingdom)

^b Micromachining Systems   (United Kingdom)

^c Association of Industrial Laser Users

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CUTTING; DRILLING; ELECTRONIC EQUIPMENT; MICROMACHINING; SILICON; SOLID STATE LASERS; STAINLESS STEEL; TUNGSTEN;

ABLATION MECHANISMS; MATERIAL PROPERTIES; MICRODRILLING;

SEMICONDUCTOR LASERS;

EID: 33645145984     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5060530     Document Type: Conference Paper

References (7)

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