Surface modification of polyimide films by argon plasma for copper metallization on microelectronic flex substrates

Journal of Applied Polymer Science

Volumn 99, Issue 3, 2006, Pages 744-755

  Lin, Yung Sen ^a   Liu, Huang Ming ^a   Chen, Hsuan Ta ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

Adhesion; Argon plasma; Atomic force miscroscopy (AFM); ESCA XPS; Surface modification

Indexed keywords

ARGON; METALLIZING; PLASMAS; STRENGTH OF MATERIALS; SURFACE TREATMENT;

ARGON PLASMA; ELECTRON SPECTROSCOPY FOR CHEMICAL ANALYSIS (ESCA); ESCA/XPS; POLYIMIDE FILMS;

PLASTIC FILMS;

FILM; METALLIZATION; POLYIMIDE; SUBSTRATE; SURFACE MODIFICATION;

EID: 33645137323     PISSN: 00218995     EISSN: 10974628     Source Type: Journal    
DOI: 10.1002/app.22545     Document Type: Article

References (16)

1. Fronz, V. Circuit World 1991, 17, 15.
2. Inagaki, N.; Tasaka, S.; Baba, T. J Adhes Sci Technol 2001, 15, 749.
3. Rozovskis, G.; Vinkevicius, J.; Jaciauskiene, J. J Adhes Sci Technol 1996, 10, 399.
4. Ma, J. B.; Dragon, J.; Van Derveer, W.; Entenberg, A.; Lindberg, V.; Anschel, M.; Shih, D.-Y.; Lauro, P. J Adhes Sci Technol 1995, 9, 487.
5. Egitto, F. D.; Matienzo, L. J.; Blackwell, K. J.; Knoll, A. R. J Adhes Sci Technol 1994, 8, 411.
6. Inagaki, N.; Tasaka, S.; Hibi, K. J Adhes Sci Technol 1994, 8, 395.
7. Inagaki, N.; Tasaka, S.; Ohmori, H.; Miru, S. J Adhes Sci Technol 1996, 10, 243.
8. Inagaki, N.; Tasaka, S.; Masumoto, M. J Appl Polym Sci 1995, 5, 135.
9. Inagaki, N.; Tasaka, S.; Masumoto, M. Macromolecules 1996, 29, 1642.
10. Baglin, J. Fundamentals of Adhesion; Plenum: New York, 1991; Chapter 13, pp 363-382.
11. Baglin, J. Handbook of Ion Beam Processing Technology; Plenum: New York, 1989; Chapter 14, pp 279-299.
12. Garbassi, F.; Morra, M.; Occhiello, E. Polymer Surfaces from Physics to Technology; Wiley: New York, 1994.
13. Gargassi, F.; Occhiello; E.; Polato; Brown, F. A. J Mater Sci Ed 1987, 1450.
14. Menezes, M.; Robertson, I. M.; Birnbaum, H. K. J Mater Res 1999, 14, 4025.
15. Yasuda, H. K. Plasma Polymerization; Academic Press: London, 1985; p 334.
16. Lin, Y.-S. Ph.D. Dissertation, University of Missouri-Columbia, 1996; p 200.