Replication of a sinusoidal grid surface by hot embossing and UV-casting

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6052, Issue , 2005, Pages

  Tsurumi, Naoya ^a   Gao, Wei ^a   Kimura, Akihide ^a   Kiyono, Satoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Glass; Hot embossing; Metrology surface; Polymer materials; Replication; UV casting

Indexed keywords

HOT EMBOSSING; METROLOGY SURFACE; REPLICATION;

DIAMONDS; GLASS; METAL CASTINGS; MICROMETERS; MOTION ESTIMATION; SERVOMECHANISMS; TURNING;

SURFACE TREATMENT;

EID: 33645089404     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.648300     Document Type: Conference Paper

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