Interdigitated single crystal piezoelectric actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6048, Issue , 2005, Pages

  Hong, Yong K ^a   Moon, Kee S ^a  

^a AGC Paul S Roel Chair in Construction Engineering and Management   (United States)

Author keywords

Interdigitated electrodes; Monomorph; Piezoelectric actuation; PMN PT

Indexed keywords

INTERDIGITATED ELECTRODES; MONOMORPH; PIEZOELECTRIC ACTUATION; PMN-PT;

ACTUATORS; CANTILEVER BEAMS; ELECTRIC POTENTIAL; ELECTRODES; ELECTROMECHANICAL DEVICES; SINGLE CRYSTALS;

PIEZOELECTRIC MATERIALS;

EID: 33645080208     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.650617     Document Type: Conference Paper

References (8)

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