Comparison between WCC/DLC, CrN/DLC and RF produced DLC coatings

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 2005, Pages 556-561

  Hieke, A ^a   Hurkmans, T ^a   Van Der Kolk, G J ^a   Tobler, M ^a   Bonetti, R ^a  

^a No 1 Industrial Estate   (Switzerland)

Author keywords

Diamond like carbon coatings; Industrial coating equipment; MHz and kHz frequencies; Plasma assisted CVD

Indexed keywords

DIAMOND LIKE CARBON FILMS; ELASTIC MODULI; HARDNESS; NATURAL FREQUENCIES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

DIAMOND-LIKE CARBON COATINGS; INDUSTRIAL COATING EQUIPMENT; MHZ AND KHZ FREQUENCIES; PLASMA ASSISTED CVD;

COATINGS;

EID: 33644978127     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. S.R.P. Silva, J. Robertson, W.I. Milne, G.A.J. Amaratunga, "Amorphous Carbon: State of the Art", Proc. 1st International Specialist Meeting on Amorphous Carbon (SMAC '97) World Scientific Publishing Co., Singapore, (1998).
2. A. Grill, "Diamond-like carbon: state of the art", Diamond and Related Materials, 428-434, 8 (1999).
3. A. Hieke, K. Bewilogua, I. Bialuch, and K. Weigel, "Multifunctional Amorphous Carbon based Coatings", 44th Annual Technical Conference Proceedings of the Society of Vacuum Coaters, 63-66, (2001).
4. L. Holland, "Some characteristics and uses of low pressure plasmas in materials science", J.Vac. Sci. Technol. 5, 14 (1977).
5. A. Hieke, K. Bewilogua, K. Taube, I. Bialuch, K. Weigel, "Efficient deposition technique for diamond-like carbon coatings", 43rd Annual Technical Conference Proceedings of the Society of Vacuum Coalers. 301-304, (2000).