Investigation on the monocrystalline silicon surface damage caused by slurry erosion

Mocaxue Xuebao/Tribology

Volumn 26, Issue 1, 2006, Pages 7-11

  Xu, Jin ^a   Luo, Jian Bin ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Erosive wear; Monocrystalline silicon; Nanoparticle impact; Surface damage

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; EROSION; MICROSTRUCTURE; SILICON; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

EROSIVE WEAR; MONOCRYSTALLINE SILICON; NANOPARTICLE IMPACT; SURFACE DAMAGE;

TRIBOLOGY;

EID: 33644945400     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. Xu J, Luo J B, Lu X C, et al. Research progresses on material removal mechanisms of surface polishing with ultra precision[J]. Chinese Science Bulletin, 2004, 49: 1687-1693.
2. Moon Y. Mechanical aspect of the material removal mechanism in chemical mechanical polishing[D]. Berkeley, University of California, 2002.
3. Lei S. Mechanical interactions at the interface of chemical mechanical polishing[D]. Georgia: Georgia Institute of Technology, 2000.
4. Luo J F, Dornfeld D A. Material removal mechanism in chemical mechanical polishing: theory and modeling[J]. IEEE Transaction on Semiconductor Manufacturing, 2001, 14(2): 112-133.
5. Ahmadi G, Xia X. A model for mechanical wear and abrasive particle adhesion during the chemical mechanical polishing process[J]. Journal of the Electrochemical Society, 2001, 148(3): G99-G109.
6. Liang H, Kaufman, Sevilla R, et al, Wear phenomena in chemical mechanical polishing[J]. Wear, 1997, 211: 271-279.
7. Zhang F, Ahmed B. The role of particles adhesion and surface deformation in chemical mechanical polishing processes[J]. Electrochemical and Solid-State Letters, 1998, 1(4): 184-187.
8. Zhang L C, Tanaka H. On the mechanics and physics in the nano-indentation of silicon monocrystals[J]. JSME International Journal (Series A), 1999, 42: 546-559.
9. Johnson K L. Contact Mechanics[M]. London: Cambridge University Press, 1985.