Silicon nanocrystal-based non-volatile memory devices

Thin Solid Films

Volumn 504, Issue 1-2, 2006, Pages 25-27

  Ng, C Y ^a   Chen, T P ^a   Sreeduth, D ^a   Chen, Q ^a   Ding, L ^a   Du, A ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

Nanostructures; Semiconductors

Indexed keywords

CMOS INTEGRATED CIRCUITS; ION BEAMS; NANOSTRUCTURED MATERIALS; SEMICONDUCTING SILICON;

NANOSTRUCTURES; TUNNEL OXIDE;

DATA STORAGE EQUIPMENT;

EID: 33644921754     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.09.031     Document Type: Conference Paper

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