Molecular dynamics with phase-shift-based electronic stopping for calibration of ion implantation profiles in crystalline silicon

Thin Solid Films

Volumn 504, Issue 1-2, 2006, Pages 121-125

  Chan, H Y ^a,e,f   Nordlund, K ^b   Gossmann, H J L ^c   Harris, M ^c   Montgomery, N J ^d   Mulcahy, C P A ^d   Biswas, S ^d   Srinivasan, M P ^a   Benistant, F ^e   Ng, C M ^e   Chan, Lap ^e  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b UNIVERSITY OF HELSINKI   (Finland)

^c AXCELIS TECHNOLOGIES   (United States)

^d BRUNEL UNIVERSITY   (United Kingdom)

^e CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

^f NONE   (Singapore)

Author keywords

Electronic stopping; Interatomic potential; Molecular dynamics; Nuclear stopping

Indexed keywords

ION IMPLANTATION; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; PHASE SHIFT; PROBABILITY DENSITY FUNCTION; SEMICONDUCTOR DOPING;

ELECTRONIC STOPPING; INTERATOMIC POTENTIAL; NUCLEAR STOPPING;

SILICON;

EID: 33644920361     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.09.153     Document Type: Conference Paper

References (22)

1. J.F. Ziegler, J.P. Biersack, and U. Littmark The Stopping and Range of Ions in Solids 1985 Pergamon Press New York
2. M. Hautala Phys. Rev., B 30 1984 5010
3. M.T. Robinson, and I.M. Torrens Phys. Rev., B 9 1974 5008
4. S. Tian J. Appl. Phys. 93 2003 5893
5. K. Nordlund Comput. Mater. Sci. 3 1995 448
6. J. Sillanpaa, K. Nordlund, and J. Keinonen Phys. Rev., B 62 2000 3109
7. K.M. Beardmore, and N. Gronbech-Jensen Phys. Rev., E Stat. Phys. Plasmas Fluids Relat. Interdiscip. Topics 57 1998 7278
8. J. Sillanpaa, K. Nordlund, and J. Keinonen Phys. Scr. T79 1999 272
9. J. Peltola, K. Nordlund, and J. Keinonen Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 195 2002 269
10. K. Nordlund, and N. Runeberg Nucl. Instrum. Methods Phys. Res., B Beam Interact. Mater. Atoms 132 1997 45
11. DMOL is a trademark of Accelrys Inc. San Diego, California, USA.
12. W. Brandt, and M. Kitagawa Phys. Rev., B 25 1982 5631
13. P.M. Echenique, R.M. Nieminen, and R.H. Ritchie Solid State Commun. 37 1981 779
14. M.J. Puska, and R.M. Nieminen Phys. Rev., B 27 1983 6121
15. T.L. Ferrell, and R.H. Richie Phys. Rev., B 16 1977 115
16. J. Sillanpaa, K. Nordlund, and J. Keinonen Phys. Rev., B 62 2000 3109
17. M. Deutsch Phys. Rev., B 45 1992 646
18. B. Dawson Proc. R. Soc. Lond., A 298 1967 379
19. R.F. Stewart J. Chem. Phys. 58 1973 1668
20. N.K. Hansen, and P. Coppens Acta Crystallogr., A 34 1978 909
21. E. Clementi, and C. Roetti At. Data Nucl. Data Tables 14 1974 177
22. J.F. Zieglar Handbook of Ion Implantation Technology 1992 Elsevier Press Amsterdam