Optical and mechanical property changes in thin-film filters with post deposition thermal treatments

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 3 A, 2006, Pages 1783-1787

  Wei, Chao Tsang ^a,b   Shieh, Han Ping D ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Compression stress; Dichroic mirror; DWDM filters; Ion assisted deposition; Reactive electron beam deposition

Indexed keywords

ANNEALING; HEAT TREATMENT; MECHANICAL PROPERTIES; THIN FILMS; TITANIUM DIOXIDE;

COMPRESSION STRESS; DICHROIC MIRROR; DWDM FILTERS; ION-ASSISTED DEPOSITION; REACTIVE ELECTRON-BEAM DEPOSITION;

BANDPASS FILTERS;

EID: 33644906696     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.1783     Document Type: Article

References (13)

1. P. Wierer and H. Spitz: Photonics Spectra 27 (1993) No. 9, 95.
2. R. Chua and B. Cai: Lightwave 15 (1998) 64.
3. F. Villa, A. Martinez and L. E. Regalado: Appl. Opt. 39 (2000) 1602.
4. I. C. Stevenson: Society of Vacuum Coater 41st Annu. Tech. Conf. Proc., 1998, p. 281.
5. H. A. Macleod and E. Pelletier: Opt. Acta 24 (1977) 907.
6. F. Flory, E. Pelletier, G. Albrand and Y. Hu: Appl Opt. 28 (1989) 2952.
7. C. Grezes-Besset, R. Richier and E. Pelletier: Appl. Opt. 28 (1989) 2960.
8. C.-T. Wei and H.-P. D. Shieh: Jpn. J. Appl. Phys. 44 (2005) 7577.
9. H. A. Macleod: Thin-Film Optical Filters (Macmillan, New York, 1986) 2nd ed., Chap. 7, p. 234.
10. G. G. Stoney: Proc. R. Soc. 9 (1909) 172.
11. H. Windischmann: J. Appl. Phys. 62 (1987) 1800.
12. H. A. Macleod: Thin-Film Optical Filters (Macmillan, New York, 1986) 2nd ed.. Chap. 7, p. 244.
13. J. F. Nye: Physical Properties of Crystals-Their Representation by Tensors and Matrices (Oxford Science, Oxford, 1993) p. 243.