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Volumn 60, Issue 12, 2006, Pages 1524-1526
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Microwave plasma in situ generation of nitride reagents
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
HYDRAZINE;
MICROWAVES;
NITRIDES;
SYNTHESIS (CHEMICAL);
THIN FILMS;
NITRIDING REAGENTS;
PHOTONIC MATERIALS;
THIN FILM NITRIDE;
PLASMAS;
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EID: 33644866131
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.matlet.2005.11.063 Document Type: Article |
Times cited : (4)
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References (14)
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