Ti coating of nanocrystalline diamond by atomic layer deposition

Key Engineering Materials

Volumn 304-305, Issue , 2006, Pages 48-51

  Zang, J B ^a   Lu, J ^a   Wang, Y H ^a   Qi, X H ^a   Yuan, Y G ^a  

^a YANSHAN UNIVERSITY   (China)

Author keywords

Atomic layer deposition (ALD); Coating; Nanocrystalline diamond; TiC

Indexed keywords

CERAMIC MATERIALS; CRYSTALLINE MATERIALS; DIAMONDS; TITANIUM CARBIDE;

ATOMIC LAYER DEPOSITION (ALD); DIAMOND PARTICLES; NANOCRYSTALLINE DIAMOND; TIC;

NANOSTRUCTURED MATERIALS;

EID: 33644856376     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-986-5.48     Document Type: Conference Paper

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