Gas pressure effects on the structure of CNx thin films deposited by laser ablation

Radiation Effects and Defects in Solids

Volumn 160, Issue 10-12, 2005, Pages 601-608

  Barreca, F ^a   Fazio, E ^a   Neri, F ^a   Barletta, E ^b   Trusso, S ^c   Fazio, B ^c  

^a UNIVERSITY OF MESSINA   (Italy)

^b UNIVERSITY OF BONN   (Germany)

^c CNR   (Italy)

Author keywords

CN x films; Film deposition; Laser ablation

Indexed keywords

CARBON NITRIDE; LASER ABLATION; NITROGEN; PARTIAL PRESSURE; PRESSURE EFFECTS; SHOCK WAVES; X RAY PHOTOELECTRON SPECTROSCOPY;

FILM DEPOSITION; GAS PRESSURE; OPTICAL EMISSION SPECTROSCOPY; PHOTOGRAPHY IMAGING;

THIN FILMS;

EID: 33644789800     PISSN: 10420150     EISSN: 10294953     Source Type: Journal    
DOI: 10.1080/10420150500493048     Document Type: Conference Paper

References (12)

1. A.Y. Liu and M.L. Cohen, Science 245 841 (1989).
2. A.Y. Liu and M.L. Cohen, Phys. Rev. B 41 10727 (1990).
3. E. Kroke and M. Schwarz, Coord. Chem. Rev. 248 493 (2004).
4. S. Trusso, C. Vasi and F. Neri, Thin Solid Films 355-356 219 (1999).
5. A.M. Mezzasalma, G. Mondio, F. Neri et al., Appl. Phys. Lett. 78 326 (2001).
6. A.M. Mezzasalma, G. Mondio, F. Neri et al., Phys. D: Appl. Phys. 36 541 (2001).
7. Y.B. Zel'dovich and Y.P. Raizer, Physics of Shock Waves and High Temperature Hydrodynamic Phenomena (Academic Press, New York, 1966).
8. K.W.R. Gilkes, H.S. Sands, D.N. Batchelder et al., Appl. Phys. Lett. 70 1908 (1997).
9. A.C. Ferrari and J. Robertson, Phys. Rev. B 61 14095 (2000).
10. M. Tabbal, P. Merel, M. Chaker et al., J. Appl. Phys. 85 3860 (1999).
11. K.J. Koivusaari and S. Leppavuori, J. Appl. Phys. 85 2915 (1999).
12. B.K. Tay, X. Shi, E.J. Liu et al., Thin Solid Films 346 155 (1999).