Thin film processing and integration methods to enable affordable mobile communications systems

Integrated Ferroelectrics

Volumn 71, Issue , 2005, Pages 29-44

  Cole, M W ^a   Nothwang, W D ^a   Joshi, P C ^b   Hirsch, S ^c   Demaree, J D ^a  

^a U S ARMY RESEARCH LABORATORY   (United States)

^b SHARP LABORATORIES OF AMERICA   (United States)

^c OAK RIDGE INSTITUTE FOR SCIENCE AND EDUCATION   (United States)

Author keywords

BST; Buffer layer; Ferroelectric thin films; Integration; Phase shifters

Indexed keywords

BARIUM COMPOUNDS; CAPACITANCE; INTEGRATION; MOBILE TELECOMMUNICATION SYSTEMS; OPTIMIZATION; PHASE SHIFTERS; SILICON;

BUFFER LAYERS; METALORGANIC SOLUTION; ON-THE-MOVE (OTM);

FERROELECTRIC THIN FILMS;

EID: 33644769136     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580590965032     Document Type: Conference Paper

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