Dense yttrium oxide film prepared by aerosol deposition process at room temperature

Journal of the Ceramic Society of Japan

Volumn 114, Issue 1327, 2006, Pages 272-276

  Iwasawa, Junichi ^a,b   Nishimizu, Ryoichi ^a,b   Tokita, Masahiro ^a,b   Kiyohara, Masakatsu ^a,b   Uematsu, Keizo ^b  

^a TOTO LTD   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Adhesion force; Aerosol deposition; Transmission electron microscopy; Transparency; Volume resistivity; Yttrium oxide film

Indexed keywords

ADHESION; AEROSOLS; DEPOSITION; ELECTRIC CONDUCTIVITY; QUARTZ; TRANSMISSION ELECTRON MICROSCOPY; TRANSPARENCY; YTTRIUM COMPOUNDS;

ADHESION FORCE; AEROSOL DEPOSITION; ROOM TEMPERATURE;

METALLIC FILMS;

EID: 33644686577     PISSN: 09145400     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj.114.272     Document Type: Article

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